RARE EARTH ELEMENT CERIUM COMPOSITE OXIDE PARTICLE AND MANUFACTURING METHOD THEREFOR AND POLISHING C

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PROBLEM TO BE SOLVED : To provide a polishing slurry capable of polishing a silicone polished film at high speed. SOLUTION : A rare earth element cerium composite oxide particle satisfies 3.8≤A/B<5, where A is area strength of a (111) surface and B is area strength of a (200) surface in an X ray diffraction (XRD) with a Cu-k α ray source. The manufacturing method of oxide particles can manufacture the rare earth element cerium composite oxide particle satisfies 3.8≤A/B<5, where A is area strength of the (111) surface and B is area strength of the (200) surface in an X ray diffraction (XRD) with a Cu-k α ray source by heating a composition containing a salt containing a rare earth element and water at 100°C or less. SELECTED DRAWING : Figure 1 COPYRIGHT : (C)2018, JPO&INPIT