Ruthenium complex and its manufacturing method, a ruthenium-containing thin film and method of manu

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PROBLEM TO BE SOLVED : To provide a ruthenium complex useful for making a ruthenium-containing thin film, and a method of producing the ruthenium complex.SOLUTION : This invention provides a ruthenium complex represented by formula (1), where R, R, R, R, R, R, Rand Rindependently represent a hydrogen atom or 1-6C alkyl group; and Rrepresents 1-6C alkyl group, excluding the cases where all of R, Rand Rare simultaneously a hydrogen atom and all of R, R, R, R, Rand Rare simultaneously a methyl group.