SILICON NITRIDE SINTERED COMPACT, HEATING DEVICE AND ADSORPTION DEVICE

文件类型：PDF文档
文件大小：237K
[Object] To provide a silicon nitride sintered compact, a heating device and an adsorption device of which thermal conductivities are high. [Solution] A silicon nitride sintered compact of the present invention includes a silicon nitride crystal, an MgRE 4 Si 3 O 13 crystal (RE is a rare earth element), and an REMgSi 2 O 5 N crystal, and thus, has high thermal conductivity. Moreover, a heating device including a protective tube which is made up of the silicon nitride sintered compact, is capable of efficiently transmitting heat of a heater. Furthermore, an adsorption device including an adsorption member which is made up of the silicon nitride sintered compact, is capable of efficiently dissipating heat of an adsorbed body.