Production of cyclic silazane compounds

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PROBLEM TO BE SOLVED : To provide a highly efficient method for producing a cyclic silazane compound, which suppresses a reverse reaction by rapidly silylating an alcohol which causes the reverse reaction.SOLUTION : The method for producing a cyclic silazane compound represented by the following general formula (2) (Rto Rand n are as defined in the following general formula (1)) by intermolecular cyclization of an organic silicon compound represented by general formula (1) (Ris a C1-20 unsubstituted or substituted monovalent hydrocarbon group; Ris a C3-6 unsubstituted or substituted divalent hydrocarbon groups; Rand Rare C1-10 unsubstituted or substituted monovalent hydrocarbon groups which may be the same or different; and n is an integer of 0 to 2) in the presence of a compound having a Si-N bond.