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A slurry for thermal spraying comprising particles containing a rare earth oxyfluoride and a dispersing medium. The particles have an average particle size of 0.01 to 10 µm. The particles may further contain a rare earth fluoride. When the particles are analyzed by X-ray diffractometry using or CuK±1 radiation, a ratio of the maximum peak intensity (SO) of a rare earth oxide observed in a range of 2¸ angles of from 20° to 40° to the maximum peak intensity (S1) of the rare earth oxyfluoride observed in the same range, S0/S1, is preferably 0.10 or less.