CERAMIC MATERIAL, PRODUCTION METHOD THEREOF, AND MEMBER FOR SEMICONDUCTOR PRODUCTION APPARATUS

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PROBLEM TO BE SOLVED : To provide a ceramic material having high corrosion resistance to Cl-based plasma in comparison with hitherto. SOLUTION : A ceramic material contains a crystal phase of a complex oxide comprising a group 2 element M and a rare earth element Re, in which the group 2 element M is Sr, Ca or Ba, and in XRD chart, a first novel peak is observed between a peak on (040) plane of MRe2O4 and a peak on (320) plane. Such a ceramic material can be produced by preparing MRe2O4 as a raw material for flame spray, and by thermally spraying the raw material for flame spray to a predetermined object. SELECTED DRAWING : None COPYRIGHT : (C)2017, JPO&INPIT