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MATERIAL FOR SPRAY COATING, SPRAY COATING FILM, AND MEMBER WITH SPRAY COATING FILM

2025-06-17 09:264760下载
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PROBLEM TO BE SOLVED : To provide a material for spray coating capable of forming a spray coating film having improved plasma erosion resistance. SOLUTION : A material for spray coating contains an oxyhalogenated compound of a rare-earth element (RE-O-X) of 77 mass% or more, the compound containing the rare-earth element (RE), oxygen (O), and a halogen element (X) as constituent elements. The spray coating material does not substantially contain an oxide of the rare-earth element. SELECTED DRAWING : Figure 1 COPYRIGHT : (C)2017, JPO&INPIT


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