Fluorine-containing elastomer composition and rubber member

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PROBLEM TO BE SOLVED : To provide a fluorine-containing elastomer composition that forms a rubber member which is small in compression set and hardly causes cracks even when it is irradiated with plasma in a state in which a high load is imposed.SOLUTION : The fluorine-containing elastomer composition includes 100 pts.mass of a peroxide-crosslinkable fluorine-containing elastomer, 0.1-10 pts.mass of at least one kind of substance selected from silane compounds represented by formula (I) and 0.5-10 pts.mass of peroxide. In formula (I), Rrepresents a fluoroalkyl group, and R, Rand Rare the same or different and represent an alkyl group or alkoxy group, at least two of R, Rand Rbeing an alkoxy group.