POWDER THERMAL SPRAY MATERIAL OF RARE-EARTH ELEMENT OXYFLUORIDE, AND THERMAL SPRAY MEMBER OF RARE-E

文件类型：PDF文档
文件大小：93K
PROBLEM TO BE SOLVED : To provide a powder thermal spray material of a rare-earth element oxyfluoride for forming spray coating of a rare-earth oxyfluoride which has higher corrosion resistance than a conventional spray coating of a rare-earth oxide or a rare-earth fluoride, and further provide a spray member having the spray coating of a rare-earth oxyfluoride. SOLUTION : There is provided a powder thermal spray material of rare-earth element oxyfluoride which contains 0.5 mass% or less of carbon and 3 mass% or more and 15 mass% or less of oxygen, and of which the rare-earth element oxyfluoride particles have a contour aspect ratio of 2 or less, a mean particle diameter of 10 μm or more and 100 μm or less, and a bulk density of 0.8 g/cm3 or more and 2 g/cm3 or less. The invention provides a powder thermal spray material of rare-earth element oxyfluoride suitable for plasma spray in the atmosphere. A thermal spray member of rare-earth element oxyfluoride manufactured from the powder thermal spray material of rare-earth element oxyfluoride has higher corrosion resistance to plasma etching and a longer life than a member having spray coating of a rare-earth oxide or a rare-earth fluoride, when used as a plasma resistant member in a halogen gas. COPYRIGHT : (C)2015, JPO&INPIT