MULTILAYER SUBSTRATE STRUCTURE

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Multi-layer is formed on a substrate, being formed on the substrate heat matching layer, matching heat said layer, said layer including a lattice matching layer on. Heat matching layer molybdenum, molybdenum-copper, mullite, sapphire, graphite, aluminum- it buys the nitrides , silicon, silicon carbide, zinc oxides and rare earth oxides includes at least one of layer-. Lattice matching layer of chemical elements and number 1 to form a silver alloy, includes a chemical element, and number 2. Number 1 and number 2 a chemical element, and similar decisions structures has and chemical properties. Heat matching layer coefficient of thermal expansion of the mold and both the lattice matching layer lattice parameters III-V group compound semiconductor members of. approximately equal of (member). Lattice matching layer members of group compound semiconductor III-V a lattice constant approximately equal to of.. Lattice matching layer and a heat matching layer lateral control the shutter based may be a film is formed on a substrate.