RARE-EARTH OXIDE BASED EROSION RESISTANT COATINGS FOR SEMICONDUCTOR APPLICATION

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An article includes a body that is coated with a ceramic coating. The ceramic coating may include Y2O3 in a range between about 45 mol% to about 99 mol%, ZrO2 in a range between about 0 mol% to about 55 mol%, and Al2O3 in a range between about 0 mol% to about 10 mol%. The ceramic coating may alternatively include Y2O3 in a range between about 30 mol% to about 60 mol%, ZrO2 in a range between about 0 mol% to about 20 mol%, and Al2O3 in a range between about 30 mol% to about 60 mol%.