分享好友 知识库首页 频道列表

Oxide for semiconductor layer of thin-film transistor, sputtering target, and thin-film transistor

2025-06-18 05:203150下载
文件类型:PDF文档
文件大小:1240K
Disclosed is an oxide for a semiconductor layer of a thin-film transistor, said oxide being excellent in the switching characteristics of a thin-film transistor, specifically enabling favorable characteristics to be stably obtained even in a region of which the ZnO concentration is high and even after forming a passivation layer and after applying stress. The oxide is used in a semiconductor layer of a thin-film transistor, and the aforementioned oxide contains Zn and Sn, and further contains at least one element selected from group X consisting of Al, Hf, Ta, Ti, Nb, Mg, Ga, and the rare-earth elements.


请登录查看


反对 0
举报 0
收藏 0
打赏 0
评论 0