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SPUTTERING TARGET FOR RARE EARTH MAGNET AND PRODUCTION METHOD THEREOF

2025-06-20 15:273470下载
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PROBLEM TO BE SOLVED : To provide a sintered compact target excellent in mass productivity and reproducibility, and useful for forming a rare earth magnet thin film having excellent magnetic properties, especially a neodymium magnet thin film, and to provide a production method thereof. SOLUTION : In a target for forming a rare earth magnet containing neodymium, iron and boron (or ferroboron) as essential components, the area ratio of a Nd2Fe14B phase is 61% or higher, the area ratio of an α-Fe phase is 8% or lower, and the residual part is constituted of a NdxFe(1-x-y)By phase (where, 11.9
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