METHOD OF REGENERATING TARGET FOR FORMING FILM

文件类型：PDF文档
文件大小：51K
PROBLEM TO BE SOLVED : To provide a regeneration method for a target for forming a film for regeneration, in which expensive rare metal left in a product at the end of using the target for forming film is effectively recovered with a low cost by utilizing an adjustment technology and a sintering technology for metal powders by hydrogenation reaction and dehydrogenation reaction of a used target. SOLUTION : A regeneration method for a target for forming film includes steps of : hydrogenation treatment where a used target for forming film is hydrogenated by heat treatment in a hydrogen atmosphere to form a hydrogenated product; a crush treatment where the hydrogenated product formed at the hydrogenation treatment is crush-treated to form hydrogenerated crushed powders; a dehydrogenation treatment where the hydrogenated crushed powders are dehydrogenated with heat-treatment under a reduced pressure or vacuum to form dehydrogenated crushed powders; and a sintering process where the dehydrogenated crushed powders are sintering-treated by heat treatment to from sintered powders. COPYRIGHT : (C)2014, JPO&INPIT