STORAGE METHOD OF METAL LANTHANUM TARGET, VACUUM-SEALED METAL LANTHANUM TARGET, AND THIN FILM FORM

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PROBLEM TO BE SOLVED : To provide storage method of a sputtering target of lanthanum being rare-earth metal for a long period of time in a usable state as a sputtering target in which pulverization phenomenon due to oxidation caused by residue and invasion of air is suppressed. SOLUTION : A sputtering target surface of metal lanthanum is polished to bring roughness Ra of the surface to 1 μm or less, and coating of lanthanum fluoride is formed on the surface by hydrofluoric acid treatment for 1 to 5 minutes. Then, after loading the sputtering target into a vacuum pack having oxygen permeability 0.1 cm3/m2 24h atm or less and vapor permeability at 0.1 g/m2 24h or less, the vacuum pack is vacuum sucked and sealed to store the target. COPYRIGHT : (C)2014, JPO&INPIT