SEMICONDUCTOR DEVICE WITH A SILICON DIOXIDE GATE INSULATION LAYER IMPLANTED WITH A RARE EARTH ELEMEN

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One illustrative method disclosed herein includes forming a gate insulation layer on a semiconducting substrate, performing an ion implantation process to implant a rare earth element into the gate insulation layer, and forming a silicon-containing gate electrode above the gate insulation layer comprising the implanted rare earth element. One illustrative device disclosed herein includes a gate insulation layer positioned on a semiconducting substrate, wherein the gate insulation layer is comprised of silicon dioxide and a rare earth element, and a silicon-containing gate electrode positioned on the gate insulation layer.