POWDER FOR COATING AN ETCH CHAMBER

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Particle powder, a number greater than 95% of the particles having a circularity greater than or equal to 0.85, the powder containing more than 99.8% of a rare earth oxide and/or a hafnium oxide and/or an aluminium oxide, as a percentage by weight on the basis of the oxides, and having : - a median particle size D50 less than 15 μm, a 90th percentile of the particle sizes D90 less than 30 μm, and a size dispersion index (D90 - D10)/D10 less than 2; and - a relative density greater than 90%.