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A slurry for thermal spraying according to the present invention comprises particles each containing an oxyfluoride of a rare earth element and a dispersion medium, wherein the average particle diameter of the particles is 0.01 to 10 μm. Each of the particles may also contain a fluoride of a rare earth element. It is preferred that, in an X-ray diffraction measurement of the particles using a Cu-Kα line or a Cu-Kα1 line, the ratio (S0/S1) of the intensity (S0) of the maximum peak of an oxide of a rare earth element which appears in the range of 2θ = 20 to 40 degrees to the intensity (S1) of the maximum peak of an oxyfluoride of the rare earth element which appears in the same range is 0.10 or less.