VAPOR EMISSION APPARATUS AND FILM DEPOSITION APPARATUS

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PROBLEM TO BE SOLVED : To provide a technology of forming an organic compound film with a uniform film thickness on a film at a high film deposition rate in vacuum. SOLUTION : A vapor emission apparatus for emitting vapor of an organic compound in vacuum includes : an organic compound introduction part 22 for introducing a liquid organic compound monomer through a distributor 22a into a vaporization part 81; a mass flow controller 36 for controlling a flow rate and introducing a noble gas controlled to be a prescribed temperature into the vaporization part 81; and a vaporizer 23 for vaporizing the organic compound monomer 33 introduced into the vaporization part 81 while conveying it. The vaporizer 23 includes a plurality of planar first-fourth vaporization members 24A-24D which can be respectively independently temperature-controlled and deliver the organic compound. The adjacent first-third vaporization members 24A-24C on a delivery direction upstream side among the first-fourth vaporization members 24A-24D are provided with a distribution part for distributing the organic compound monomer. COPYRIGHT : (C)2014, JPO&INPIT