ZnO deposition material and its manufacturing method

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PROBLEM TO BE SOLVED : To provide a vapor deposition material of ZnO, which has high sintered density, hardly causes abnormal electrical discharge even when high voltage has been applied, and is suitable as a vapor deposition material for use in forming a vapor deposition film in a wide range, and to provide a manufacturing method therefor. SOLUTION : The vapor deposition material of ZnO is formed of a pellet of a sintered compact which contains ZnO as a main component and an oxide of a rare-earth element, and has a relative density of 97.5% or more. The content of the oxide of the rare-earth element is preferably 0.05 to 10 mass%. The vapor deposition material of ZnO is formed by mixing a ZnO powder of which the average particle size of a primary particle is 0.1 to 5.0 μm, with an oxide powder of the rare earth element, of which the average particle size of the primary particle is 1/5 to 1/2 of the average particle size of the ZnO powder, so that the content of the oxide of the rare-earth element can be in the above range, then adding a binder to the mixture, press-forming it, demolding it, and baking it at 1, 000°C or higher. The manufacturing method therefor is also disclosed. COPYRIGHT : (C)2009, JPO&INPIT