复合陶瓷及半导体制造装置之构成构件

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The purpose of this invention is to obtain a ceramic material with corrosion resistance (plasma resistance) and mechanical strength. The composite ceramic includes three phases consisting of an MgO phase, a YAP (YAlO3) phase and a spinel (MgAl2O4) phase. This composite ceramic has a plasma resistance greater than that of the alumina and equal to that of the MgO. Mechanical properties, such as the hardness and the bending strength, of the composite ceramic are equal or superior to those of Al2O3. A raw material cost and a manufacturing cost thereof are lower than those of a rare-earth oxide. Further, electric conductive particles can be added thereto to lower an electrical resistivity. The composite ceramic is suitably usable as component parts for a semiconductor manufacturing apparatus.