HALL ELEMENT AND MANUFACTURING METHOD OF THE SAME, AND MAGNETIC DETECTOR

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PROBLEM TO BE SOLVED : To provide a reliable hall element which is inexpensive, enables mass production, does not include any element unstable in price and supply, such as a rare metal, has high mobility, and has low temperature dependence in mobility, a carrier density, and an output voltage. SOLUTION : A hall element 1 is formed, for example, via an isolation layer 12 of SiO2 etc. above a silicon substrate 11, on the isolation layer 12. The hall element 1 includes a channel region 13 composed of a graphite thin film, and four electrodes 14a, 14b, 14c, 14d. COPYRIGHT : (C)2013, JPO&INPIT