METHOD FOR PRODUCING RARE EARTH HYDRIDE, HYDROGEN SENSOR AND THIN FILM TRANSISTOR

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PROBLEM TO BE SOLVED : To provide a method for producing a rare earth hydride that can generate a rare earth hydride semiconductor even in an atmosphere at low temperature (particularly, room temperature) and low concentration hydrogen. SOLUTION : In a method for producing a rare earth hydride, a laminate film with a platinum film formed on a rare earth element film is heat-treated in an atmosphere containing hydrogen; a rare earth element in the film is hydrogenated, and it turns into a film with rare earth hydride generated therein. SELECTED DRAWING : None COPYRIGHT : (C)2019, JPO&INPIT