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The method involves operating an ion gun (16) in stabilized mode with a mask-gun (19) in closing position for a period of 45 seconds to 3 or 5 minutes during stabilized mode. The removable mask-gun is provided with a treating enclosure (10) between closing position of an outlet of the ion gun and releasing position of an outlet. Gas is introduced into the ion gun, where the gas is chosen from a group consisting of rare gas argon, xenon, krypton, argon and/or oxygen.