PROCESS FOR PRODUCING POLYMER

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PROBLEM TO BE SOLVED : To provide a process for producing (purifying) a polymer, capable of effectively removing impurities in a polymer in a convenient way even if the polymer is made by polymerizing a monomer having a polar group. SOLUTION : In the process, a polymer solution including a polymer containing impurities and an organic solvent are brought into contact with a precipitation solvent or (a re-precipitation solvent) which is a poor solvent with respect to the polymer under an action of an ultrasonic wave to precipitate or deposit the polymer, and then a polymer containing less impurities is produced by recovering the precipitated or deposited polymer. This process is useful for purifying a polymer for use of a resist. COPYRIGHT : (C)2013, JPO&INPIT