Wafer

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PROBLEM TO BE SOLVED : To provide a dummy wafer which has a high corrosion resistance against a cleaning gas and an etching gas which are highly corrosive, and can be used for a long period. SOLUTION : The wafer has a rare-earth oxide-sprayed film on the uppermost layer of a substrate. The wafer can prevent reduction in thickness of a semiconductor wafer in cleaning and stabilizing a plasma etching apparatus and a plasma deposition apparatus, and can improve its service life, if used as a dummy wafer, because it has high film hardness. COPYRIGHT : (C)2009, JPO&INPIT