METHOD FOR PRODUCING NITRIDE COMPOUND SEMICONDUCTOR SUBSTRATE, AND NITRIDE COMPOUND SEMICONDUCTOR F

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Disclosed is a technique capable of preventing occurrence of warping in a nitride compound semiconductor layer, and by which a nitride compound semiconductor layer having small variations in the in-plane off angle can be grown with good reproducibility. Specifically disclosed is a method for producing a nitride compound semiconductor substrate using an HVPE process, wherein a low-temperature protective layer is formed on a rare earth perovskite substrate at a first growth temperature (a first step), and a thick layer composed of a nitride compound semiconductor is formed on the low-temperature protective layer at a second growth temperature that is higher than the first growth temperature (a second step). In the first step, the supply amounts of HCl and NH3 are controlled so that the supply ratio of HCl to NH3, namely the supply ratio III/V is 0.016-0.13, and the low-temperature protective layer has a film thickness of 50-90 nm.