Ti-ALLOY WIRING FILM AND ELECTRODE, AND Ti-ALLOY SPUTTERING TARGET

文件类型：PDF文档
文件大小：135K
PROBLEM TO BE SOLVED : To provide a novel metal wiring film having characteristics excellent in wet etching property.SOLUTION : The wiring film to be used as a wiring Ti-alloy film for a display or touch panel sensor includes 3-50 atom% of an X-group element (X is at least one element selected from the group consisting of rare earth elements, Ge, Si, Sn, Hf, Zr, Mg, Ca, Sr, Al, Zn, Mn, Co, Fe and Ni) as alloy component and/or 0.2-3.0 mass% of oxygen, with the balance being Ti and unavoidable impurities.COPYRIGHT : (C)2013, JPO&INPIT