FILM DEPOSITION APPARATUS

文件类型：PDF文档
文件大小：133K
PROBLEM TO BE SOLVED : To produce a permanent magnet at a low cost with improved productivity by depositing a film at high speed on the surface of an iron-boron-rare earth-based magnet of a prescribed shape while effectively utilizing Dy and Tb, which are film deposition materials. SOLUTION : There are provided : a treatment chamber that is evacuatable; a heating means for heating the inside of the treatment chamber; and a holding means for separately holding an evaporation material being a bulk body and an object to be treated. The holding means for holding the object to be treated is composed of a member which allows passing of the material evaporated from the evaporation material by heating in the treatment chamber and on which a plurality of the objects to be treated are placed side-by-side. COPYRIGHT : (C)2013, JPO&INPIT