SUBSTRATE PROCESSING APPARATUS WITH MECHANISM RECOVERING RARE METAL

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PROBLEM TO BE SOLVED : To provide a substrate processing apparatus having a metal recovery mechanism which can recover rare metal with high efficiency by peeling the rare metal from a substrate provided with a rare metal layer. SOLUTION : There is provided a substrate processing apparatus 100 including a stage part F on which a substrate is mounted; a mixed phase fluid jetting part E which peels rare metal from the substrate by jetting a mixed phase fluid containing steam and water to the substrate; a chamber part I having a tank wall 171 and a discharge pipe 172 discharging a mixed phase waste; a first processing part G which has a vapor liquid separation mechanism 181 which separates the mixed phase waste sent from the discharge pipe into a liquid phase and a vapor phase; and solid liquid separation means 182 which recovers rare metal from the liquid phase separated by the vapor liquid separation mechanism 181, and recovers the rare metal present in the liquid phase in the mixed phase waste; and a second processing part H which has a cyclone type separation mechanism 191 which recovers rare metal included in the vapor phase sent from the vapor liquid separation mechanism of the first processing part, and recovers rare metal present in the vapor phase in the mixed phase waste. COPYRIGHT : (C)2012, JPO&INPIT