METHOD FOR PRODUCING SUPERCONDUCTING THIN FILM, AND METHOD FOR MANUFACTURING SUPERCONDUCTING DEVICE

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PROBLEM TO BE SOLVED : To provide a simple method for producing a superconducting thin film including a superconducting body consisting of a rare earth element, fluorine, iron, arsenic and oxygen while preventing a fluorine compound from being produced as an impurity on a film surface. SOLUTION : The method for producing the superconducting thin film includes a step of forming, by using at least a solid raw material of a rare earth element and a solid raw material of rare earth trifluoride, the superconducting thin film including the superconducting body consisting of a rare earth element, fluorine, iron, arsenic and oxygen, on a substrate by a molecular beam epitaxy method. COPYRIGHT : (C)2012, JPO&INPIT