Conductive ceramic and member for a semiconductor manufacturing device and its manufacturing method

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PROBLEM TO BE SOLVED : To provide an electroconductive ceramics having a high conductivity while maintaining excellent characteristics inherent in an AlN matrix. SOLUTION : The conductive ceramics comprises AlN as a matrix phase and contains a rare earth element-containing carbon compound in a grain boundary phase. The rare earth element-containing carbon compound forms a conductive network continuously formed in a three-dimensional net-like state through a triple point of the grain boundary phase. An electrical resistance of the whole sintered compact is decreased and the conductivity of the conductive ceramics is changed over a wide range from 10-9S/cm to 101S/cm since the conductive network greatly decreases a resistance of the grain boundary phase. A corrosion resistance to halogen group corrosive gas and its plasma, a high heat conductivity and a high strength of the AlN being the matrix phase are not decreased since the rare earth elements-containing carbon compound does not substantially exist at the matrix phase. COPYRIGHT : (C)2007, JPO&INPIT