METHOD FOR MEASURING ORGANIC OR POLYMERIC SOLID SAMPLE BY DISCHARGE EMISSION SPECTROSCOPY

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PROBLEM TO BE SOLVED : To provide an analytic method for a solid sample containing an organic (layer) or a polymeric (layer) by discharge emission spectroscopy, in which an etching rate is increased as well as homogeneity of etching can be increased while the intensity of an emission line (in emission spectroscopy) and/or ionization yield (in mass analysis) can be enhanced, as so as to improve an SN ratio of a signal to be detected. SOLUTION : The method for measuring a solid sample including at least one organic material layer by discharge emission spectroscopy includes steps of : disposing the sample in a discharge emission lamp; supplying a mixture gas of at least one kind of rare gas and oxygen into the discharge emission lamp, in which the oxygen concentration is controlled to 1 mass% to 10 mass% of the mixed gas; generating a discharge emission plasma by inducing discharge at a radio frequency on the electrode of the discharge emission lamp; irradiating the organic material layer with the plasma; and measuring at least one kind of signal representing an ion seed and/or an excited seed of the plasma by spectroscopy. COPYRIGHT : (C)2012, JPO&INPIT