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PROBLEM TO BE SOLVED : To improve refining purity of uranium hexafluoride before re-enrichment. SOLUTION : The purity of refined object component is increased by a first condenser 3 cooling treating object gas 1 containing the object component gas to be refined and impurities to condense the object component gas, a second condenser 5 cooling the impurities and uncondensed object component gas discharged from the condenser 3 at a lower temperature than the condenser 3, a heating process heating the condensate of the object component condensed in the condenser 5, and by returning the gas gasified in the heating process to the condenser 3. COPYRIGHT : (C)2010, JPO&INPIT