APPARATUS FOR PURIFYING TRICHLOROSILANE AND METHOD OF PURIFYING TRICHLOROSILANE

文件类型：PDF文档
文件大小：505K
PURPOSE : A method and an apparatus for purifying trichlorosilane are provided to reduce the consumed amount of energy and minimize the use of utilities required for the use of a condenser and a re-boiler.CONSTITUTION : A method for purifying trichlorosilane includes the following : A chlorosilane mixture is separated from the reaction product of a trichlorosilane manufacturing reaction. The chlorosilane mixture is based on trichlorosilane and tetrachlorosilane. The chlorosilane mixture is separated into first upper stream and first lower stream. The first upper stream is based on the mixture of trichlorosilane and impurities. The first lower stream is based on tetrachlorosilane. The first upper stream is separated into second upper stream and second lower stream. The second upper stream is based on the mixture of trichlorosilane and impurities with the low melting point. The second lower stream is based on the mixture of trichlorosilane and impurities with the high melting point. The second lower stream is separated into third upper stream and third lower stream. The third upper stream is based on trichlorosilane. The third lower stream is based on the mixture of the trichlorosilane and impurities with the high melting point.COPYRIGHT KIPO 2011