PROCESS FOR PRODUCTION OF THIN FILM LITHIUM SECONDARY BATTERY

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Disclosed is a technique for producing a thin film lithium secondary battery without altering the properties of a metal lithium film in a negative electrode therein. Specifically disclosed is a process for producing a chargeable-and-dischargeable thin film lithium secondary battery comprising : a substrate (70); a positive electrode film (92) which is arranged on the substrate (70) and is adapted so that lithium can be inserted into the film (92) and lithium can be detached from the film (92); an electrolyte film (93) which is arranged on the positive electrode film (92) so as to contact with the positive electrode film (92) and contains a lithium ion, and into which a lithium ion can migrate; and a negative electrode film (95) which is arranged on the electrolyte film (93) so as to contact with the electrolyte film (93) and comprises metal lithium. The process for producing the thin film lithium secondary battery is characterized by, after forming the negative electrode film (95), bringing the surface of the negative electrode film (95) into contact with a surface treatment gas comprising a rare gas and carbon dioxide to form a lithium carbonate film (97) on the surface of the negative electrode film (95).