Ceramic heater and its manufacturing method

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PROBLEM TO BE SOLVED : To enhance uniformity of temperature on a heating surface of a ceramic heater without using a dummy member. SOLUTION : In the method of manufacturing the ceramic heater, both the front and rear surfaces of an inner molding 32 consisting of a low-temperature sintered material powder which has aluminum nitride powder mainly and contains a rare earth oxide powder 0.03-1 wt.% are pinched by a pair of outer layers 30, 30 consisting of aluminum nitride sintered body with a volume resistivity of 1015 Ωcm or more through resistance heating elements 14, 16 made of a metal mesh, and in that state, it is calcined at 1, 600-1, 750°C to obtain the ceramic heater 10. COPYRIGHT : (C)2011, JPO&INPIT