PROCESS FOR PRODUCING POROUS QUARTZ GLASS OBJECT, AND OPTICAL MEMBER FOR EUV LITHOGRAPHY

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A process for producing a porous quartz glass object which comprises hydrolyzing a precursor for a metallic dopant and a precursor for SiO2 in the flame from a burner to yield fine glass particles and depositing and growing the yielded fine glass particles on a substrate to produce the porous quartz glass object. The burner has at least two nozzles, and a mixed gas comprising (A) a metallic-dopant precursor gas, (B) an SiO2 precursor gas, (C) one of H2 and O2 gases, and (D) one or more gases selected from a group consisting of rare gases, N2, CO2, hydrogen halides, and H2O, the proportion of the gas(es) (D) being 5-70 mol%, and (E) the other of the H2 and O2 gases for (C) are respectively supplied to different nozzles of the burner.