METHOD OF PRODUCING ZnO VAPOR DEPOSITION MATERIAL

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PROBLEM TO BE SOLVED : To produce ZnO vapor deposition material excellent in compositional homogeneity, by controlling segregation of rare earth element oxide powder containing one of rare earth elements added to ZnO raw powder, and also to produce ZnO vapor deposition material from which a ZnO film with homogeneous film composition is obtained. SOLUTION : A green monolayer 19, or green laminate 20 or 29 is produced from a green sheet obtained by a doctor blade method, using mixed raw powder 14 of ZnO raw powder 12 and rare earth element oxide powder 13 containing one of rare earth elements, and pulverized after calcined to produce mixed powder 25 or 31. Granulated powder is produced using the mixed powder, and a ZnO vapor deposition material 34 made of ZnO sintered compact containing a rare earth element is produced through forming and sintering. COPYRIGHT : (C)2010, JPO&INPIT