AL ALLOY FILM FOR DISPLAY, DISPLAY AND SPUTTERING TARGET

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PROBLEM TO BE SOLVED : To provide an Al alloy film for a display, which sufficiently and surely exhibits low contact resistance, even when it is directly connected to a transparent pixel electrode by eliminating a barrier metal layer. SOLUTION : Disclosed is an Al alloy film which is directly connected to a transparent conductive film on a substrate of the display. The Al alloy film contains 0.05 to 1.0 atom% of Ge, 0.03 to 2.0 atom% of at least one element selected from among an element group (Ni, Ag, Co and Zn), and 0.05 to 0.5 atom% of at least one element selected from among an element group consisting of rare earth elements. More than 50 Ge-containing deposit particles per 100 μm2 with a long diameter of 20 nm or more, are present in the Al alloy film for a display. COPYRIGHT : (C)2010, JPO&INPIT