SURFACE MODIFICATION APPARATUS AND SURFACE MODIFICATION METHOD

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PROBLEM TO BE SOLVED : To provide a surface modification apparatus for irradiating an irradiation target body with an electronic beam, the surface modification apparatus uniformly irradiating an irradiation target surface of the irradiation target body with the electronic beam irrespective of shape of the irradiation target surface. SOLUTION : In the surface modification apparatus for modifying the irradiation target surface by irradiating the irradiation target body W with the electron beam in rare gas G, a single electrode 3 is used as an anode electrode and a cathode electrode in common. The single electrode 3 is used as the anode electrode to ionized the rare gas surrounding the single electrode 3 to generate plasma P. After filling up the plasma into the interval between the single electrode and the irradiation target surface, the single electrode 3 is used as the cathode electrode to irradiate the irradiation target body W with the electronic beam from the single electrode 3. COPYRIGHT : (C)2010, JPO&INPIT