VAPOR GUIDE TUBE

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PROBLEM TO BE SOLVED : To provide a vapor guide tube capable of uniformly heating the entire tube and efficiently re-evaporating a material deposited on an inner circumferential surface of the tube. SOLUTION : The vapor guide tube 10 comprises a crucible 12 which houses a material for vapor deposition, and heats the material to generate the vapor of the material, a glass tube 11 in which the crucible 12 is installed therein, and the vapor generated from the crucible 12 is allowed to flow forwardly in the longitudinal direction, and a metal tube 13 for covering an outer circumferential surface of the glass tube 11. In the vapor guide tube 10, a transparent conductive tin oxide film having the predetermined electric resistance is film-deposited on the outer circumferential surface of the glass tube 11, an electric resistance thin film having the predetermined thickness is deposited on the outer circumferential surface of the glass tube 11, and the electric resistance thin film is heated by its resistance heating to heat the glass tube 11 at the predetermined temperature. COPYRIGHT : (C)2010, JPO&INPIT