REFLECTING FILM FOR OPTICAL INFORMATION RECORDING MEDIUM, AND SPUTTERING TARGET FOR FORMING REFLECT

文件类型：PDF文档
文件大小：1627K
Provided is an Al-based alloy reflecting film which reduces noise on an optical information recording medium by having a reflecting film surface accurately reproduce grooves, pits and the like formed on a substrate, and has high reflectivity.  A sputtering target which is effective for forming such a reflecting film is also provided.  The reflecting film to be used for the optical information recording medium is substantially composed of an Al-based alloy containing 2.0-15.0 atm% of a rare-earth element, and has a crystallite size of 30 nm or smaller in the thickness direction of the reflecting film.