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PURPOSE : A separation method of rare gas stream and a device thereof are provided to increase the content of rare gas by collecting a mixed gas stream when the mixed concentration of the rare gas is high among the mixed exhaust gas.CONSTITUTION : A separation method of rare gas stream comprises the following : installing a collecting line by branching an exhaust line discharging a mixed gas stream; operating a valve to flow the mixed gas stream to a collecting line when the mixed concentration of the rare gas is high; and separating the mixed gas stream containing a large quantity of the rage gas to the colleting line.COPYRIGHT KIPO 2010