HIGH PURITY CERIUM OXIDE POWDER, PREPARATION METHOD THEREOF, AND CMP SLURRY CONTAINING THE SAME

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The present invention relates to a method for preparing cerium oxide (CeO2) by forming high purity cerium nitrate hydrate (Ce(NO3)3·6H2O) which is an intermediate. More specifically, the method for preparing cerium oxide comprises : recovering precipitates by titrating sodium hydroxide in a cerium chloride composition and separating supernatants and precipitates; obtaining solid cerium precursors by finely spraying and filtering an excess of purified water, wherein the spraying and filtering process is performed to reduce praseodymium (Pr) contained in the precipitates; and obtaining cerium oxide using cerium nitrate hydrate formed by titrating nitric acids in the cerium precursors. In addition, the present invention provides high purity cerium oxide powder, a preparation method thereof, and CMP slurry containing the same. The cerium oxide is prepared using cerium nitrate hydrate as an intermediate, wherein the purity of the cerium nitrate hydrate is increased through purification by titrating sodium hydroxide and washing by finely spraying an excess of purified water, so the high purity cerium oxide powder contains virtually no impurities of various rare-earth elements, especially praseodymium which has an adverse effect on properties of CMP slurry.