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Rare earth metal complex, film-forming raw material and manufacturing method

2025-06-18 21:174230下载
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A tris(sec-butylcyclopentadienyl) complex of a rare earth metal represented by general formula (I). The complex is excellent in heat resistance and volatility and is liquid, which is advantageous for use as a thin film forming material. wherein M is a rare earth metal atom.


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