EXCIMER DISCHARGE LAMP

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PROBLEM TO BE SOLVED : To provide a rare-gas halogen excimer discharge lamp capable of maintaining a high light volume at lighting of a lamp under high tube-wall load conditions, and capable of working for a long time. SOLUTION : Of the excimer discharge lamp provided with at least one outside electrode 10, 11 on the outer surface of a discharge vessel 2 made of at least one out of sapphire, YAG, and single-crystal yttria, and sealing gas containing argon (Ar) and fluorine (F) atoms in the discharge vessel 2, a density of metal impurities contained in an inside surface to a depth area up to 100 μm of the discharge vessel 2 is to be ≤600 wtppm. COPYRIGHT : (C)2009, JPO&INPIT