Method and System for Exhaust Gases Recovery of Semiconductor Device Fabricating Equipment

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PURPOSE : A method and a system for recovering a waste gas of a semiconductor manufacturing facility are provided to maximally recover a waste gas generated in a process for vacuum-pumping an inert sub gas through a change of a process and configuration.CONSTITUTION : A system for recovering a waste gas of a semiconductor manufacturing facility includes cooling gas supply parts(16, 17, 18, 19), pumping parts(12, 20), replacement gas supply parts(31~35), compression parts(43~47), and a control part. The cooling gas supply parts are connected to a loadlock chamber(2). The cooling gas supply parts supply a rare cooling gas to the loadlock chamber. The pumping parts are connected to the loadlock chamber. The pumping parts pump the rare cooling gas inside the loadlock chamber. The replacement gas supply parts are connected to the loadlock chamber. The replacement gas supply parts supply a replacement gas to the loadlock chamber. The compression parts are connected to the pumping parts. The compression parts compress a rare gas transferred from the pumping parts. The control part is connected to the cooling gas supply parts, the pumping parts, the replacement gas supply parts, and the compression parts. The control part performs a control about operations of each part.© KIPO 2009