分享好友 知识库首页 频道列表

METHOD FOR THE RAPID DENSIFICATION OF A POROUS FIBROUS SUBSTRATE, COMPRISING THE FORMATION OF A SOL

2025-06-20 11:494780下载
文件类型:PDF文档
文件大小:813K
The procedure, for use e.g. in semiconductors to increase the density of a porous substrate consists applying a fluid compound containing at least one reagent fluid precursor of a material that forms a solid deposit and an optional dilution fluid. The compound is applied at a temperature and pressure that enable a solid deposit to be formed directly on or inside the substrate while maintaining the reagent fluid and/or dilution fluid in a supercritical state. The dilution fluid used for the procedure is chemically neutral relative to the solid deposit formed, and is selected e.g. from rare atmospheric gases, nitrogen and carbon dioxide.


请登录查看


反对 0
举报 0
收藏 0
打赏 0
评论 0