ELECTROSTATIC CHUCK

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PROBLEM TO BE SOLVED : To provide an electrostatic chuck which is provided with a ceramic dielectric capable of being easily fabricated by baking in the atmospheric environment and has high plasma resistance and uses Johnsen-Rahbeck force and has high adsorption force. SOLUTION : The electrostatic chuck is provided with the ceramic dielectric wherein a ceramic material which has an yttrium oxide as a main component and is obtained by baking contains a rare earth oxide different from the main component as an auxiliary component, and the volume resistivity of the ceramic dielectric is 1×108 to 1×1014 Ωcm at a room temperature. COPYRIGHT : (C)2009, JPO&INPIT